Glove Boxes with Joule Effect Vacuum for PVD Thin Film Deposition

Joule vacuum evaporation frames integrated in a glove box under controlled atmosphere are useful in the deposition of thin layers of metallic materials (Au, Pt, Ti, Cr, Al, Li…) and oxides (SiO2, HfO2, Al2O3, …). These thermal evaporators are widely used for metallization, e.g. for photovoltaic cells and detectors, for electrode deposition (ohmic contacts), e.g. for batteries and OLED organic electronics and for refractory thin films and optical layers.

The installation described below is an example of a solution that Jacomex delivered in partnership with the Alliance Concept for the deposition of thin layers of metallic materials in purified glove boxes.

GP(concept) Glove Box

The controlled atmosphere glove box GP(concept) is the ideal model for the integration of evaporation racks. A personalized project management done by our design office guarantees a perfect glove box – evaporator integration and ergonomic optimization.

The model is available in different lengths – 2 gloves, 3 gloves, 4 gloves and two configurations – single-sided or double-sided.

The glove box is equipped with two vacuum airlocks, usually Ø400 and Ø150mm, connected to a vacuum pump (rotary vane primary pump or dry pump). Depending on the requirements, the airlocks can be produced in a heated version as well. In case of connection to another glove box that is used in the phases of deposition, preparation or characterization of substrates, it is possible to provide T vacuum airlocks that allow the introduction of materials from outside in a glove box as well as the transfer of samples from one glove box to the other.

The GP(concept) glove box is equipped with a P(sys) purification unit for continuous removal of traces of moisture and oxygen from the working volume at levels of 1 ppm or less. The purification units of the P(sys) range are high capacity gas scrubbers (N2, Ar) with variable flow rate circulator, automatic regeneration, automatic pressure regulation and 24/24 continuous Energy Saving mode. Other features (alarms, history, data export, etc…) allow an easy use with optimal working conditions. They are available in two models: a single line version with sufficient purification capacity to work comfortably over time without the need for regeneration, and a double line version to secure its working environment at 1ppm without interruption.

P(sys) single line: capacities 45L O2 – 1440 gr H20

P(sys)-II-P double line: capacities 90L O2 – 2880 gr H20

H2O and O2 sensors allow continuous monitoring of the purity of the atmosphere on screen.

The whole unit is entirely controlled by a PLC with access to data control and parameter settings on a color touch screen.

You can find our detailed information on the GP(concept) and our different P(sys) purification systems on the Jacomex website.

A P300 VACUUM PRESSURE KIT

Stainless steel 300mm cubic vacuum chamber with hinged aluminum front door with two portholes for material loading in evaporation sources or maintenance operations (e.g. changing protective screens). A process door for loading substrates from the glove box. The enclosure is equipped with a set of protective screens for the internal walls of the chamber. Various connections are also provided:

• portholes,
• empty measure,
• ventilation,
• pump connection,
• free passages to install, if necessary, your measuring accessories or other accessories.

On this HV frame, the sealing is guaranteed by the use of Viton rings.